IEST RP-NANO201.1

This Recommended Practice (RP) is intended to establish guidelines for conducting vibration measurements and reporting data where vibration-sensitive scientific instruments are located in existing or planned advanced technology facilities. This includes facilities for nanotechnology, quantum computing, microelectronics, pharmaceutical and biological research, metrology laboratories, and other research, development, and production facilities in which vibration control is important.

These guidelines are specifically for the following:
a) Selecting suitable instrumentation and hardware for use in vibration measurements
b) Establishing sensitive process tool vibration thresholds
c) Conducting vibration measurements on sites and in facilities
d) Reporting results of vibration measurements in a uniform and consistent format

Some of this vibration-sensitive equipment is used in the manufacture, measurement, and inspection of integrated circuits. Such equipment may be collectively referred to as “process tools” in this RP.

Because equipment used in a wide variety of technological applications is sensitive to vibration and sound, it is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels.